Octafluorocyclobutane

Noun

Word Frequency: 0.0

Definitions

1.NounThe organofluorine compound C4F8, related to cyclobutane by replacement of all C–H bonds with C–F bonds, and used as a deposition gas and etchant in semiconductor manufacture.

Synonyms

perfluorocyclobutane decafluorobutane perfluoromethylcyclohexane octafluoropropane perfluorooctane perfluorohexane hexafluorobenzene octafluoro carbon tetrafluoride pentafluoroethane fluoromethane tetrafluoroethylene

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